Inventor
STEVENS LUCAS HENRICUS JOHANNE
NL4 patents
Patents
4 patentsUS7405417B2Jul 29, 2008
Lithographic apparatus having a monitoring device for detecting contamination
ASML NETHERLANDS BV62 citations96
US7167232B2Jan 23, 2007
Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus
ASML NETHERLANDS BV15 citations80
US7095479B2Aug 22, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations72
US7629594B2Dec 8, 2009
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations59