Inventor
KALAKKAD DINESH S
US5 patents
Patents
5 patentsUS6551487B1Apr 22, 2003
Methods and apparatus for controlled-angle wafer immersion
NOVELLUS SYSTEMS INC145 citations98
US6755946B1Jun 29, 2004
Clamshell apparatus with dynamic uniformity control
NOVELLUS SYSTEMS INC79 citations97
US7686927B1Mar 30, 2010
Methods and apparatus for controlled-angle wafer positioning
NOVELLUS SYSTEMS INC26 citations92
US7097410B1Aug 29, 2006
Methods and apparatus for controlled-angle wafer positioning
NOVELLUS SYSTEMS INC28 citations92
US7033465B1Apr 25, 2006
Clamshell apparatus with crystal shielding and in-situ rinse-dry
NOVELLUS SYSTEMS INC48 citations92