Inventor

KELCHNER KATHRYN M

US6 patents

⚠️ This page may combine multiple inventors who share the name “KELCHNER KATHRYN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CALIFORNIA

3 patents

US9611987B2Apr 4, 2017

White light source employing a III-nitride based laser diode pumping a phosphor

UNIV CALIFORNIA15 citations80

US11552452B2Jan 10, 2023

Semi-polar III-nitride optoelectronic devices on m-plane substrates with miscuts less than +/− 15 degrees in the c-direction

UNIV CALIFORNIA0 citations61

US9917422B2Mar 13, 2018

Semi-polar III-nitride optoelectronic devices on M-plane substrates with miscuts less than +/− 15 degrees in the C-direction

UNIV CALIFORNIA0 citations51

LAM RES CORP

2 patents

US9214333B1Dec 15, 2015

Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD

LAM RES CORP539 citations98

US9076646B2Jul 7, 2015

Plasma enhanced atomic layer deposition with pulsed plasma exposure

LAM RES CORP81 citations95

HSU PO SHAN

1 patent

US9077151B2Jul 7, 2015

Semi-polar III-nitride optoelectronic devices on M-plane substrates with miscuts less than +/-15 degrees in the C-direction

HSU PO SHAN0 citations42