Inventor
VOLYNETS VLADIMIR
KR7 patents
⚠️ This page may combine multiple inventors who share the name “VOLYNETS VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
6 patentsUS7309961B2Dec 18, 2007
Driving frequency modulation system and method for plasma accelerator
SAMSUNG ELECTRONICS CO LTD9 citations69
US10249485B2Apr 2, 2019
Pulsed plasma analyzer and method for analyzing the same
SAMSUNG ELECTRONICS CO LTD2 citations68
US7253572B2Aug 7, 2007
Electromagnetic induced accelerator based on coil-turn modulation
SAMSUNG ELECTRONICS CO LTD4 citations58
US9865474B2Jan 9, 2018
Etching method using plasma, and method of fabricating semiconductor device including the etching method
SAMSUNG ELECTRONICS CO LTD0 citations48
US10418250B2Sep 17, 2019
Etching method using remote plasma source, and method of fabricating semiconductor device including the etching method
SAMSUNG ELECTRONICS CO LTD0 citations47
US7804250B2Sep 28, 2010
Apparatus and method to generate plasma
SAMSUNG ELECTRONICS CO LTD0 citations42