Inventor

YANG HEE-JEON

KR3 patents

⚠️ This page may combine multiple inventors who share the name “YANG HEE-JEON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

1 patent

US9865474B2Jan 9, 2018

Etching method using plasma, and method of fabricating semiconductor device including the etching method

SAMSUNG ELECTRONICS CO LTD0 citations48

JEON SANG-JEAN

1 patent

US8404080B2Mar 26, 2013

Apparatus to treat a substrate

JEON SANG-JEAN1 citations42

KIM GO-JUN

1 patent

US9520301B2Dec 13, 2016

Etching method using plasma, and method of fabricating semiconductor device including the etching method

KIM GO-JUN0 citations40