Inventor
HUNG SHENG-WEI
TW3 patents
Patents
3 patentsUS10340230B1Jul 2, 2019
Semiconductor chip
UNITED MICROELECTRONICS CORP1 citations55
US10640372B2May 5, 2020
Method for fabricating MEMS device integrated with a semiconductor integrated circuit
UNITED MICROELECTRONICS CORP0 citations46
US10472232B2Nov 12, 2019
MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof
UNITED MICROELECTRONICS CORP0 citations46