Inventor
LOWRANCE ROBERT B
US74 patents
⚠️ This page may combine multiple inventors who share the name “LOWRANCE ROBERT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
40 patentsUS7234584B2Jun 26, 2007
System for transporting substrate carriers
APPLIED MATERIALS INC86 citations98
US6955197B2Oct 18, 2005
Substrate carrier having door latching and substrate clamping mechanisms
APPLIED MATERIALS INC73 citations98
US6045620AApr 4, 2000
Two-piece slit valve insert for vacuum processing system
APPLIED MATERIALS INC116 citations98
US5884640AMar 23, 1999
Method and apparatus for drying substrates
APPLIED MATERIALS INC535 citations98
US7243003B2Jul 10, 2007
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC65 citations97
US5469035ANov 21, 1995
Two-axis magnetically coupled robot
APPLIED MATERIALS INC93 citations97
US7156221B2Jan 2, 2007
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC27 citations96
US6082948AJul 4, 2000
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC76 citations96
US6027574AFeb 22, 2000
Method of drying a substrate by lowering a fluid surface level
APPLIED MATERIALS INC43 citations96
US5763851AJun 9, 1998
Slotted RF coil shield for plasma deposition system
APPLIED MATERIALS INC93 citations96
US5697750ADec 16, 1997
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC50 citations96
US5656902AAug 12, 1997
Two-axis magnetically coupled robot
APPLIED MATERIALS INC36 citations96
US5355066AOct 11, 1994
Two-axis magnetically coupled robot
APPLIED MATERIALS INC44 citations96
US5227708AJul 13, 1993
Two-axis magnetically coupled robot
APPLIED MATERIALS INC87 citations96
US4911597AMar 27, 1990
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC128 citations95
US5280983AJan 25, 1994
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC108 citations94
US5224809AJul 6, 1993
Semiconductor processing system with robotic autoloader and load lock
APPLIED MATERIALS INC60 citations94
US7527141B2May 5, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC20 citations93
US7299831B2Nov 27, 2007
Substrate carrier having door latching and substrate clamping mechanisms
APPLIED MATERIALS INC20 citations93
US7293642B2Nov 13, 2007
Methods and apparatus for transporting substrate carriers
APPLIED MATERIALS INC16 citations93
US7221993B2May 22, 2007
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC43 citations93
US7168553B2Jan 30, 2007
Dynamically balanced substrate carrier handler
APPLIED MATERIALS INC24 citations93
US6352403B1Mar 5, 2002
Controlled environment enclosure and mechanical interface
APPLIED MATERIALS INC26 citations93
US7792608B2Sep 7, 2010
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC21 citations92
US7433756B2Oct 7, 2008
Calibration of high speed loader to substrate transport system
APPLIED MATERIALS INC34 citations92
US7359767B2Apr 15, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
APPLIED MATERIALS INC33 citations92
US7346431B2Mar 18, 2008
Substrate carrier handler that unloads substrate carriers directly from a moving conveyer
APPLIED MATERIALS INC27 citations92
US7230702B2Jun 12, 2007
Monitoring of smart pin transition timing
APPLIED MATERIALS INC39 citations92
US6799939B2Oct 5, 2004
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
APPLIED MATERIALS INC16 citations92
US5879127AMar 9, 1999
Robot assembly
APPLIED MATERIALS INC22 citations92
US7258520B2Aug 21, 2007
Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing
APPLIED MATERIALS INC34 citations90
US7684895B2Mar 23, 2010
Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
APPLIED MATERIALS INC10 citations84
US7673735B2Mar 9, 2010
System for transporting substrate carriers
APPLIED MATERIALS INC15 citations84
US7506746B2Mar 24, 2009
System for transporting substrate carriers
APPLIED MATERIALS INC12 citations84
US7674360B2Mar 9, 2010
Mechanism for varying the spacing between sputter magnetron and target
APPLIED MATERIALS INC12 citations82
US5583408ADec 10, 1996
Two-axis magnetically coupled robot
APPLIED MATERIALS INC16 citations82
US7711445B2May 4, 2010
Systems and methods for transferring small lot size substrate carriers between processing tools
APPLIED MATERIALS INC5 citations74
US7552816B2Jun 30, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC3 citations74
US7506747B2Mar 24, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC6 citations74
US7503448B2Mar 17, 2009
Break-away positioning conveyor mount for accommodating conveyor belt bends
APPLIED MATERIALS INC6 citations74
KATEEVA INC
7 patentsUS9961782B2May 1, 2018
Transport path correction techniques and related systems, methods and devices
KATEEVA INC21 citations93
US9656491B1May 23, 2017
Apparatus and method for control of print gap
KATEEVA INC17 citations93
US9884501B2Feb 6, 2018
Printing system assemblies and methods
KATEEVA INC13 citations92
US9550383B2Jan 24, 2017
Apparatus and method for control of print gap
KATEEVA INC18 citations92
US9505245B2Nov 29, 2016
Printing system assemblies and methods
KATEEVA INC15 citations92
US9302513B2Apr 5, 2016
Apparatus and method for control of print gap
KATEEVA INC4 citations84
US10414181B2Sep 17, 2019
Printing system assemblies and methods
KATEEVA INC6 citations83
APPLIED MATERIAL INC
1 patentLOWRANCE ROBERT B
1 patentQUILES EFRAIN
1 patentShowing the top 50 of 74 patents by PatentIndex Score.