Inventor
KOSHTI SUSHANT S
US24 patents
⚠️ This page may combine multiple inventors who share the name “KOSHTI SUSHANT S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUS11581203B2Feb 14, 2023
Systems for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC7 citations85
US10192765B2Jan 29, 2019
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC13 citations81
US12159796B2Dec 3, 2024
Systems and methods for integrating load locks into a factory interface footprint space
APPLIED MATERIALS INC0 citations62
US11996307B2May 28, 2024
Semiconductor processing tool platform configuration with reduced footprint
APPLIED MATERIALS INC1 citations62
US10199256B2Feb 5, 2019
Methods and systems for improved mask processing
APPLIED MATERIALS INC1 citations62
US8356968B2Jan 22, 2013
Methods and apparatus for an efficient handshake between material handling and material processing devices for safe material transfer
APPLIED MATERIALS INC3 citations62
US7577487B2Aug 18, 2009
Methods and apparatus for a band to band transfer module
APPLIED MATERIALS INC4 citations62
US11087998B2Aug 10, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
US10971381B2Apr 6, 2021
Transfer chambers with an increased number of sides, semiconductor device manufacturing processing tools, and processing methods
APPLIED MATERIALS INC0 citations61
USD1112395SFeb 10, 2026
Mainframe with integrated lid
APPLIED MATERIALS INC0 citations60
USD1109784SJan 20, 2026
Mainframe with integrated lid
APPLIED MATERIALS INC0 citations60
USD1076836SMay 27, 2025
Mainframe with integrated lid
APPLIED MATERIALS INC0 citations60
US11450539B2Sep 20, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations60
US12142508B2Nov 12, 2024
Factory interface robots usable with integrated load locks
APPLIED MATERIALS INC0 citations59
US11282724B2Mar 22, 2022
Substrate processing systems, apparatus, and methods with factory interface environmental controls
APPLIED MATERIALS INC0 citations59
US12564974B2Mar 3, 2026
Factory interface with redundancy
APPLIED MATERIALS INC0 citations55
US12076854B2Sep 3, 2024
Increased number of load ports on factory interface with robot that moves on track
APPLIED MATERIALS INC0 citations55
US8379082B2Feb 19, 2013
System, methods and apparatus for substrate carrier content verification using a material handling system
APPLIED MATERIALS INC0 citations51
US12159802B2Dec 3, 2024
Shortened load port for factory interface
APPLIED MATERIALS INC0 citations47
US10847391B2Nov 24, 2020
Semiconductor device manufacturing platform with single and twinned processing chambers
APPLIED MATERIALS INC0 citations42
US10409295B2Sep 10, 2019
Methods and apparatus for enhanced flow detection repeatability of thermal-based mass flow controllers (MFCS)
APPLIED MATERIALS INC0 citations41