Inventor
HAGIHARA JUNICHI
JP21 patents
⚠️ This page may combine multiple inventors who share the name “HAGIHARA JUNICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
17 patentsUS6344752B1Feb 5, 2002
Contactor and production method for contractor
TOKYO ELECTRON LTD83 citations98
US5825192AOct 20, 1998
Probe card device used in probing apparatus
TOKYO ELECTRON LTD84 citations96
US6590381B1Jul 8, 2003
Contactor holding mechanism and automatic change mechanism for contactor
TOKYO ELECTRON LTD27 citations92
US5708222AJan 13, 1998
Inspection apparatus, transportation apparatus, and temperature control apparatus
TOKYO ELECTRON LTD47 citations89
US7981217B2Jul 19, 2011
Vertical heat treatment apparatus and method of transferring substrates to be processed
TOKYO ELECTRON LTD8 citations84
US6438831B1Aug 27, 2002
Method of manufacturing an interconnector
TOKYO ELECTRON LTD19 citations84
US7777511B2Aug 17, 2010
Inspection apparatus having a capacitive pressure sensor between the mounting body and the support body
TOKYO ELECTRON LTD7 citations73
US9671459B2Jun 6, 2017
Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus
TOKYO ELECTRON LTD2 citations72
USRE41515EAug 17, 2010
Contactor and production method for contactor
TOKYO ELECTRON LTD2 citations63
US7859283B2Dec 28, 2010
Probe apparatus, probing method, and storage medium
TOKYO ELECTRON LTD2 citations62
US7791362B2Sep 7, 2010
Inspection apparatus
TOKYO ELECTRON LTD4 citations62
US12117485B2Oct 15, 2024
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11762012B2Sep 19, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11567123B2Jan 31, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11061071B2Jul 13, 2021
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations61
US10976364B2Apr 13, 2021
Test head and wafer inspection apparatus
TOKYO ELECTRON LTD0 citations61
US10753972B2Aug 25, 2020
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations51
IBIDEN CO LTD
2 patentsUS7091733B2Aug 15, 2006
Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method
IBIDEN CO LTD30 citations91
US7242206B2Jul 10, 2007
Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method
IBIDEN CO LTD7 citations72