Inventor
FURUYA KUNIHIRO
JP16 patents
⚠️ This page may combine multiple inventors who share the name “FURUYA KUNIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
14 patentsUS6084215AJul 4, 2000
Semiconductor wafer holder with spring-mounted temperature measurement apparatus disposed therein
TOKYO ELECTRON LTD163 citations98
US7023226B2Apr 4, 2006
Probe pins zero-point detecting method, and prober
TOKYO ELECTRON LTD111 citations97
US5708222AJan 13, 1998
Inspection apparatus, transportation apparatus, and temperature control apparatus
TOKYO ELECTRON LTD47 citations89
US9671459B2Jun 6, 2017
Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus
TOKYO ELECTRON LTD2 citations72
US6239602B1May 29, 2001
Temperature managing apparatus for multi-stage container
TOKYO ELECTRON LTD14 citations72
US12117485B2Oct 15, 2024
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11762012B2Sep 19, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11567123B2Jan 31, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11061071B2Jul 13, 2021
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations61
US10976364B2Apr 13, 2021
Test head and wafer inspection apparatus
TOKYO ELECTRON LTD0 citations61
US11119122B2Sep 14, 2021
Position correction method, inspection apparatus, and probe card
TOKYO ELECTRON LTD0 citations51
US10753972B2Aug 25, 2020
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations51
US9863977B2Jan 9, 2018
Method of contacting substrate with probe card
TOKYO ELECTRON LTD1 citations51
US9140726B2Sep 22, 2015
Support body for contact terminals and probe card
TOKYO ELECTRON LTD0 citations51