Inventor
HOSAKA TADAYOSHI
JP7 patents
Patents
7 patentsUS9671459B2Jun 6, 2017
Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus
TOKYO ELECTRON LTD2 citations72
US12117485B2Oct 15, 2024
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11762012B2Sep 19, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11567123B2Jan 31, 2023
Wafer inspection system
TOKYO ELECTRON LTD0 citations61
US11061071B2Jul 13, 2021
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations61
US10976364B2Apr 13, 2021
Test head and wafer inspection apparatus
TOKYO ELECTRON LTD0 citations61
US10753972B2Aug 25, 2020
Wafer inspection system, wafer inspection apparatus and prober
TOKYO ELECTRON LTD0 citations51