Inventor

FUKUYAMA TOSHIHIKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “FUKUYAMA TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS JAPAN

2 patents

US4702936AOct 27, 1987

Gas-phase growth process

APPLIED MATERIALS JAPAN129 citations94

US4731255AMar 15, 1988

Gas-phase growth process and an apparatus for the same

APPLIED MATERIALS JAPAN30 citations87

VLSI TECHNOLOGY RES ASS

1 patent

US4218291AAug 19, 1980

Process for forming metal and metal silicide films

VLSI TECHNOLOGY RES ASS31 citations87