P

Inventor

MIYAZAKI KYOICHI

JP61 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI KYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

17 patents
US5610715AMar 11, 1997

Displacement detecting system, an expose apparatus, and a device manufacturing method employing a scale whose displacement is detected by a selected detection head

CANON KK397 citations99
US5486919AJan 23, 1996

Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern

CANON KK155 citations99
US5767962AJun 16, 1998

Inspection system and device manufacturing method using the same

CANON KK102 citations98
US6179695B1Jan 30, 2001

Chemical mechanical polishing apparatus and method

CANON KK72 citations96
US6352469B1Mar 5, 2002

Polishing apparatus with slurry screening

CANON KK27 citations93
US6162112ADec 19, 2000

Chemical-mechanical polishing apparatus and method

CANON KK42 citations93
US6124601ASep 26, 2000

Position sensor having a reflective projecting system and device fabrication method using the sensor

CANON KK24 citations93
US5969820AOct 19, 1999

Surface position detecting system and exposure apparatus using the same

CANON KK47 citations93
US5861952AJan 19, 1999

Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position

CANON KK37 citations93
US5834767ANov 10, 1998

Surface position detecting system and projection exposure apparatus using the same

CANON KK39 citations93
US5777744AJul 7, 1998

Exposure state detecting system and exposure apparatus using the same

CANON KK46 citations93
US5585918ADec 17, 1996

Foreign particle inspecting system

CANON KK39 citations93
US5461474AOct 24, 1995

Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same

CANON KK49 citations93
US6312316B1Nov 6, 2001

Chemical mechanical polishing apparatus and method

CANON KK16 citations92
US5652657AJul 29, 1997

Inspection system for original with pellicle

CANON KK44 citations92
US5742386AApr 21, 1998

Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same

CANON KK14 citations74
US7804578B2Sep 28, 2010

Exposure apparatus and device manufacturing method

CANON KK2 citations63

PANASONIC CORP

13 patents

MIYAZAKI KYOICHI

7 patents

MINOLTA CO LTD

4 patents

IMAOKA TAKUYA

3 patents

IIYAMA TOMOKO

2 patents

PANASONIC IP MAN CO LTD

2 patents

HONJO KENICHI

1 patent

YOSHINAGA SHUNICHIRO

1 patent

Showing the top 50 of 61 patents by PatentIndex Score.