Inventor

WINEBARGER PAUL M

US7 patents

⚠️ This page may combine multiple inventors who share the name “WINEBARGER PAUL M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MOTOROLA INC

4 patents

US5175124ADec 29, 1992

Process for fabricating a semiconductor device using re-ionized rinse water

MOTOROLA INC76 citations94

US5478436ADec 26, 1995

Selective cleaning process for fabricating a semiconductor device

MOTOROLA INC138 citations93

US5372673ADec 13, 1994

Method for processing a layer of material while using insitu monitoring and control

MOTOROLA INC70 citations91

US5707492AJan 13, 1998

Metallized pad polishing process

MOTOROLA INC46 citations90

KARLIN LISA H

2 patents

US8551814B2Oct 8, 2013

Method of fabricating a semiconductor device that limits damage to elements of the semiconductor device that are exposed during processing

KARLIN LISA H2 citations60

US9061885B2Jun 23, 2015

Cavity based packaging for MEMS devices

KARLIN LISA H0 citations50

STEIMLE ROBERT F

1 patent

US9463976B2Oct 11, 2016

MEMS fabrication process with two cavities operating at different pressures

STEIMLE ROBERT F4 citations70