Inventor

SWANSON PAUL A

US6 patents

⚠️ This page may combine multiple inventors who share the name “SWANSON PAUL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

(unassigned)

3 patents

US6931938B2Aug 23, 2005

Measuring pressure exerted by a rigid surface

40 citations90

US6885116B2Apr 26, 2005

Moving coil linear motor positioning stage with a concentric aperture

40 citations90

US6031597AFeb 29, 2000

Method and apparatus for transfer of a reticle pattern onto a substrate by scanning

19 citations82

SWANSON PAUL A

1 patent

US5298939AMar 29, 1994

Method and apparatus for transfer of a reticle pattern onto a substrate by scanning

SWANSON PAUL A137 citations95

MEGAPANEL CORP

1 patent

US5883703AMar 16, 1999

Methods and apparatus for detecting and compensating for focus errors in a photolithography tool

MEGAPANEL CORP41 citations88

EQUIPMENT SOLUTIONS INC

1 patent

US7364145B2Apr 29, 2008

High stiffness flexure

EQUIPMENT SOLUTIONS INC7 citations67