Inventor
CHEBI ROBERT
US11 patents
⚠️ This page may combine multiple inventors who share the name “CHEBI ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS7476291B2Jan 13, 2009
High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation
LAM RES CORP529 citations97
US6241845B1Jun 5, 2001
Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer
LAM RES CORP249 citations96
US6528427B2Mar 4, 2003
Methods for reducing contamination of semiconductor substrates
LAM RES CORP69 citations95
US7547635B2Jun 16, 2009
Process for etching dielectric films with improved resist and/or etch profile characteristics
LAM RES CORP21 citations92
US6759336B1Jul 6, 2004
Methods for reducing contamination of semiconductor substrates
LAM RES CORP21 citations92
US6048798AApr 11, 2000
Apparatus for reducing process drift in inductive coupled plasma etching such as oxide layer
LAM RES CORP64 citations92
US7824519B2Nov 2, 2010
Variable volume plasma processing chamber and associated methods
LAM RES CORP9 citations82
US9865472B2Jan 9, 2018
Fabrication of a silicon structure and deep silicon etch with profile control
LAM RES CORP3 citations70