Inventor

LEAHEY PATRICK

US4 patents

⚠️ This page may combine multiple inventors who share the name “LEAHEY PATRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6367410B1Apr 9, 2002

Closed-loop dome thermal control apparatus for a semiconductor wafer processing system

APPLIED MATERIALS INC620 citations96

US6598615B1Jul 29, 2003

Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber

APPLIED MATERIALS INC20 citations92

INTEVAC INC

2 patents

US9914994B2Mar 13, 2018

System architecture for combined static and pass-by processing

INTEVAC INC14 citations81

US10752987B2Aug 25, 2020

System architecture for combined static and pass-by processing

INTEVAC INC0 citations49