Inventor
LIN HOM-CHUNG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “LIN HOM-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS11239099B2Feb 1, 2022
Tool monitoring device and method of monitoring tool
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US11804392B2Oct 31, 2023
Method of monitoring tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations58
US11569062B2Jan 31, 2023
Gas delivery system for ion implanter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US11056365B2Jul 6, 2021
Fault detection method in semiconductor fabrication facility
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6767407B2Jul 27, 2004
Auto-centering device for mechanical clamp
TAIWAN SEMICONDUCTOR MFG3 citations53
US6787781B1Sep 7, 2004
Arc chamber filament for ion implanter
TAIWAN SEMICONDUCTOR MFG1 citations40
US6737663B2May 18, 2004
Apparatus and method for detecting tilt angle of a wafer platform
TAIWAN SEMICONDUCTOR MFG1 citations40