Inventor

LIN SONG-YUEHA

TW2 patents

Patents

2 patents

US6767407B2Jul 27, 2004

Auto-centering device for mechanical clamp

TAIWAN SEMICONDUCTOR MFG3 citations53

US6737663B2May 18, 2004

Apparatus and method for detecting tilt angle of a wafer platform

TAIWAN SEMICONDUCTOR MFG1 citations40