Inventor
YU CHI-FU
TW5 patents
⚠️ This page may combine multiple inventors who share the name “YU CHI-FU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS5907895AJun 1, 1999
Wafer tweezer assembling device
TAIWAN SEMICONDUCTOR MFG9 citations68
US6767407B2Jul 27, 2004
Auto-centering device for mechanical clamp
TAIWAN SEMICONDUCTOR MFG3 citations53
US6787781B1Sep 7, 2004
Arc chamber filament for ion implanter
TAIWAN SEMICONDUCTOR MFG1 citations40
US6737663B2May 18, 2004
Apparatus and method for detecting tilt angle of a wafer platform
TAIWAN SEMICONDUCTOR MFG1 citations40