Inventor
TOMA YASUSHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “TOMA YASUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
13 patentsUS5883470AMar 16, 1999
Fast atomic beam source with an inductively coupled plasma generator
EBARA CORP70 citations96
US6743349B2Jun 1, 2004
Electrochemical machining method and apparatus
EBARA CORP26 citations92
US8742344B2Jun 3, 2014
Inspection apparatus
EBARA CORP10 citations84
US7208076B2Apr 24, 2007
Substrate processing apparatus and method
EBARA CORP10 citations83
US7101465B2Sep 5, 2006
Electrolytic processing device and substrate processing apparatus
EBARA CORP14 citations83
US10157722B2Dec 18, 2018
Inspection device
EBARA CORP3 citations73
US7255778B2Aug 14, 2007
Electrochemical machining method and apparatus
EBARA CORP6 citations73
US7638030B2Dec 29, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP3 citations62
US7527723B2May 5, 2009
Electrolytic processing apparatus and electrolytic processing method
EBARA CORP2 citations62
US7427345B2Sep 23, 2008
Method and device for regenerating ion exchanger, and electrolytic processing apparatus
EBARA CORP3 citations62
US10002740B2Jun 19, 2018
Inspection device
EBARA CORP0 citations52
US8946629B2Feb 3, 2015
Inspection apparatus
EBARA CORP1 citations52
US7563356B2Jul 21, 2009
Composite processing apparatus and method
EBARA CORP0 citations41