Inventor
COBURN JOHN W
US6 patents
⚠️ This page may combine multiple inventors who share the name “COBURN JOHN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS4162185AJul 24, 1979
Utilizing saturated and unsaturated halocarbon gases in plasma etching to increase etch of SiO2 relative to Si
IBM20 citations79
US4331504AMay 25, 1982
Etching process with vibrationally excited SF6
IBM22 citations78
US4226896AOct 7, 1980
Plasma method for forming a metal containing polymer
IBM28 citations78