Inventor

SEIKE YOSHIYUKI

JP3 patents

Patents

3 patents

US6553792B1Apr 29, 2003

Resist stripping method and apparatus

ASAHI SUNAC CORP8 citations67

US7686022B2Mar 30, 2010

Nozzle device, and cleaning apparatus equipped with the nozzle device

ASAHI SUNAC CORP2 citations49

US6913027B2Jul 5, 2005

Resist stripping method and apparatus

ASAHI SUNAC CORP1 citations46