Inventor
JYOUSAKA MEGUMI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “JYOUSAKA MEGUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS7968825B2Jun 28, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD29 citations91
US7897897B2Mar 1, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD10 citations82
US7957828B2Jun 7, 2011
Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium
TOKYO ELECTRON LTD6 citations62
US7910863B2Mar 22, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD4 citations62
US7902485B2Mar 8, 2011
Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereon
TOKYO ELECTRON LTD4 citations62
US7715952B2May 11, 2010
Temperature setting of thermal processing plate using zernike coefficients
TOKYO ELECTRON LTD2 citations62
US7897896B2Mar 1, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD2 citations61