Inventor
SHINOZUKA SHINICHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “SHINOZUKA SHINICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS7968825B2Jun 28, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD29 citations91
US11348791B2May 31, 2022
Bonding apparatus and bonding method
TOKYO ELECTRON LTD3 citations71
US8041525B2Oct 18, 2011
Substrate measuring method, computer-readable recording medium recording program thereon, and substrate measuring system
TOKYO ELECTRON LTD2 citations62
US7985516B2Jul 26, 2011
Substrate processing method, computer-readable storage medium and substrate processing system
TOKYO ELECTRON LTD2 citations62
US7957828B2Jun 7, 2011
Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium
TOKYO ELECTRON LTD6 citations62
US7822574B2Oct 26, 2010
Substrate measuring method, computer-readable recording medium recording program thereon, and substrate processing system
TOKYO ELECTRON LTD2 citations62
US7529595B2May 5, 2009
Method of controlling substrate processing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD4 citations62
US7411669B2Aug 12, 2008
Substrate defect inspection method, computer readable storage medium, and defect inspection apparatus
TOKYO ELECTRON LTD5 citations62
US12381083B2Aug 5, 2025
Bonding apparatus and bonding method
TOKYO ELECTRON LTD0 citations61
US7897896B2Mar 1, 2011
Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate
TOKYO ELECTRON LTD2 citations61
US12451374B2Oct 21, 2025
Bonding system and inspection method of inspecting combined substrate
TOKYO ELECTRON LTD0 citations55
US7867674B2Jan 11, 2011
Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program
TOKYO ELECTRON LTD0 citations41
TADOKORO MASAHIDE
2 patentsUS8242417B2Aug 14, 2012
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE6 citations82
US8698052B2Apr 15, 2014
Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate
TADOKORO MASAHIDE2 citations60