Inventor
YU TANG
CN7 patents
⚠️ This page may combine multiple inventors who share the name “YU TANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED SILICON INC
3 patentsUS6136613AOct 24, 2000
Method for recycling monitoring control wafers
UNITED SILICON INC22 citations88
US6046061AApr 4, 2000
Method of inspecting wafer water mark
UNITED SILICON INC5 citations60
US6099902AAug 8, 2000
Method of determining a time to clean a low pressure chemical vapor deposition (LPCVD) system
UNITED SILICON INC0 citations44
UNITED MICROELECTRONICS CORP
3 patentsUS6245617B1Jun 12, 2001
Method of fabricating dielectric layer
UNITED MICROELECTRONICS CORP11 citations71
US6383946B1May 7, 2002
Method of increasing selectivity in silicon nitride deposition
UNITED MICROELECTRONICS CORP3 citations58
US6566282B2May 20, 2003
Method of forming a silicon oxide layer
UNITED MICROELECTRONICS CORP0 citations49