Inventor
SIURY KERSTIN
DE3 patents
Patents
3 patentsUS7585759B2Sep 8, 2009
Technique for efficiently patterning an underbump metallization layer using a dry etch process
ADVANCED MICRO DEVICES INC7 citations69
US8357268B2Jan 22, 2013
System for driving and controlling a movable electrode assembly in an electrochemical process tool
ADVANCED MICRO DEVICES INC2 citations51
US7993936B2Aug 9, 2011
System and method for controlling an electrochemical etch process
ADVANCED MICRO DEVICES INC0 citations29