P

Inventor

SHIRATA YOSUKE

JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIRATA YOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

3 patents
US6002487ADec 14, 1999

Alignment method for performing alignment between shot areas on a wafer

NIKON CORP25 citations89
US6882403B1Apr 19, 2005

Lithography system and method

NIKON CORP16 citations80
US7876452B2Jan 25, 2011

Interferometric position-measuring devices and methods

NIKON CORP0 citations41

SHIRATA YOSUKE

3 patents
US9025126B2May 5, 2015

Exposure apparatus adjusting method, exposure apparatus, and device fabricating method

SHIRATA YOSUKE2 citations58
US8243254B2Aug 14, 2012

Exposing method, exposure apparatus, and device fabricating method

SHIRATA YOSUKE2 citations57
US8547520B2Oct 1, 2013

Exposing method, exposure apparatus, and device fabricating method

SHIRATA YOSUKE0 citations46

SHIRAISHI KENICHI

1 patent
US8654306B2Feb 18, 2014

Exposure apparatus, cleaning method, and device fabricating method

SHIRAISHI KENICHI0 citations40