Inventor
BROEKE DOUGLAS VAN DEN
US5 patents
⚠️ This page may combine multiple inventors who share the name “BROEKE DOUGLAS VAN DEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
4 patentsUS7247574B2Jul 24, 2007
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography
ASML MASKTOOLS BV47 citations95
US7594199B2Sep 22, 2009
Method of optical proximity correction design for contact hole mask
ASML MASKTOOLS BV22 citations92
US7774736B2Aug 10, 2010
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography
ASML MASKTOOLS BV8 citations83
US7399559B2Jul 15, 2008
Optical proximity correction method utilizing phase-edges as sub-resolution assist features
ASML MASKTOOLS BV4 citations60