Inventor
HSU STEPHEN DUAN-FU
US4 patents
Patents
4 patentsUS7247574B2Jul 24, 2007
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography
ASML MASKTOOLS BV47 citations95
US7246342B2Jul 17, 2007
Orientation dependent shielding for use with dipole illumination techniques
ASML MASKTOOLS BV33 citations91
US7774736B2Aug 10, 2010
Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography
ASML MASKTOOLS BV8 citations83
US7725872B2May 25, 2010
Orientation dependent shielding for use with dipole illumination techniques
ASML MASKTOOLS BV13 citations82