Inventor
DIREGOLO JOSEPH A
US6 patents
⚠️ This page may combine multiple inventors who share the name “DIREGOLO JOSEPH A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9030661B1May 12, 2015
Alignment measurement system
KLA TENCOR CORP16 citations80
US9347824B2May 24, 2016
Light collection optics for measuring flux and spectrum from light-emitting devices
KLA TENCOR CORP3 citations69
US8724115B2May 13, 2014
Linear stage and metrology architecture for reflective electron beam lithography
KLA TENCOR CORP0 citations38
US9778186B2Oct 3, 2017
System for electron beam detection
KLA TENCOR CORP0 citations34