Inventor
MEI FANG
US10 patents
⚠️ This page may combine multiple inventors who share the name “MEI FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7514353B2Apr 7, 2009
Contact metallization scheme using a barrier layer over a silicide layer
APPLIED MATERIALS INC37 citations90
US7910476B2Mar 22, 2011
Adhesion and minimizing oxidation on electroless CO alloy films for integration with low K inter-metal dielectric and etch stop
APPLIED MATERIALS INC3 citations62
US7829356B2Nov 9, 2010
Thin film scribe process
APPLIED MATERIALS INC3 citations60