Inventor
VAN DE WAL JOHANNES ANTONIUS MARIA
NL3 patents
Patents
3 patentsUS7755742B2Jul 13, 2010
Lithographic apparatus with mounted sensor
ASML NETHERLANDS BV2 citations57
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48