Inventor
VAN DE RIJDT JOHANNES HUBERTUS ANTONIUS
NL21 patents
⚠️ This page may combine multiple inventors who share the name “VAN DE RIJDT JOHANNES HUBERTUS ANTONIUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS10488765B2Nov 26, 2019
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus
ASML NETHERLANDS BV2 citations71
US11131937B2Sep 28, 2021
Positioning device, stiffness reduction device and electron beam apparatus
ASML NETHERLANDS BV0 citations57
US11372343B2Jun 28, 2022
Alignment method and associated metrology device
ASML NETHERLANDS BV0 citations56
US11764030B2Sep 19, 2023
Stage apparatus suitable for electron beam inspection apparatus
ASML NETHERLANDS BV0 citations53
US11621142B2Apr 4, 2023
Substrate positioning device and electron beam inspection tool
ASML NETHERLANDS BV0 citations48
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US11302512B2Apr 12, 2022
Electron beam inspection apparatus stage positioning
ASML NETHERLANDS BV0 citations47
US12249481B2Mar 11, 2025
Stage anti-fretting mechanism for roller bearing lifetime improvement
ASML NETHERLANDS BV0 citations44
US10114300B2Oct 30, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations41