Inventor
STAMMLER THOMAS
DE9 patents
⚠️ This page may combine multiple inventors who share the name “STAMMLER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
4 patentsUS6678240B2Jan 13, 2004
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG27 citations90
US7301622B2Nov 27, 2007
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG6 citations71
US6934011B2Aug 23, 2005
Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elements
ZEISS CARL SMT AG11 citations71
US7605914B2Oct 20, 2009
Optical system and method for improving imaging properties thereof
ZEISS CARL SMT AG2 citations61
ZEISS CARL SMT GMBH
4 patentsUS9280060B2Mar 8, 2016
Illumination system for microlithography
ZEISS CARL SMT GMBH5 citations82
US9606441B2Mar 28, 2017
Illumination system for microlithography
ZEISS CARL SMT GMBH1 citations61
US10151929B2Dec 11, 2018
Illumination optical unit for projection lithography and hollow waveguide component therefor
ZEISS CARL SMT GMBH1 citations51
US10088754B2Oct 2, 2018
Illumination system for microlithography
ZEISS CARL SMT GMBH0 citations50