Inventor
KAWAHARA NOBUTO
JP11 patents
Patents
11 patentsUS6876437B2Apr 5, 2005
Illumination optical system, exposure method and apparatus using the same
CANON KK39 citations90
US10335984B2Jul 2, 2019
Imprint apparatus and article manufacturing method
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US11535039B2Dec 27, 2022
Ejection-material ejection apparatus and imprinting apparatus
CANON KK1 citations62
US10513125B2Dec 24, 2019
Fluid containing member
CANON KK1 citations61
US11267252B2Mar 8, 2022
Ejection apparatus and imprint apparatus
CANON KK0 citations60
US7864297B2Jan 4, 2011
Light blocking device and exposure apparatus
CANON KK4 citations60
US11745409B2Sep 5, 2023
Storage device, ejection-material ejection device, and imprint apparatus
CANON KK0 citations51
US11573487B2Feb 7, 2023
Imprint apparatus, imprinting method, and method of manufacturing article
CANON KK0 citations50
US11333972B2May 17, 2022
Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device
CANON KK0 citations50
US7053989B2May 30, 2006
Exposure apparatus and exposure method
CANON KK1 citations49
US10199244B2Feb 5, 2019
Imprint apparatus, and method of manufacturing article
CANON KK0 citations41