Inventor

MELZER FRANK

DE22 patents

⚠️ This page may combine multiple inventors who share the name “MELZER FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MELZER FRANK

ZEISS CARL SMT AG

Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm

Collector configured of mirror shells

Collector with fastening devices for fastening mirror shells

Collector having unused region for illumination systems using a wavelength ≦193 nm

Lighting system, particularly for use in extreme ultraviolet (EUV) lithography

System for damping oscillations

Optical element deformation system

Oscillation damping system

Focusing-device for the radiation from a light source

Illumination system with a plurality of individual gratings

Facet mirror having a number of mirror facets

Focusing-device for the radiation from a light source

Collector with fastening devices for fastening mirror shells

Facet mirror having a number of mirror facets

Method and system for indirect determination of local irradiance in an optical system

Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component

Method of connecting a multiplicity of optical elements to a basic body

Focusing-device for the radiation from a light source

MELZER FRANK

Optical system for semiconductor lithography

Optical system for semiconductor lithography

Method and system for indirect determination of local irradiance in an optical system

ZEISS STIFTUNG

Precision positioning apparatus for positioning a component especially an optical component