Inventor
EGLE WILHELM
DE14 patents
⚠️ This page may combine multiple inventors who share the name “EGLE WILHELM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
8 patentsUS7015489B2Mar 21, 2006
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
ZEISS CARL SMT AG36 citations95
US7460212B2Dec 2, 2008
Collector configured of mirror shells
ZEISS CARL SMT AG11 citations92
US7321126B2Jan 22, 2008
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG26 citations92
US7244954B2Jul 17, 2007
Collector having unused region for illumination systems using a wavelength ≦193 nm
ZEISS CARL SMT AG14 citations92
US7483223B2Jan 27, 2009
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
ZEISS CARL SMT AG14 citations81
US7410265B2Aug 12, 2008
Focusing-device for the radiation from a light source
ZEISS CARL SMT AG7 citations73
US7091505B2Aug 15, 2006
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG8 citations73
US7871171B2Jan 18, 2011
Focusing-device for the radiation from a light source
ZEISS CARL SMT AG0 citations52
ZEISS STIFTUNG
4 patentsUS4812652AMar 14, 1989
Imaging method and apparatus for electron microscopes
ZEISS STIFTUNG38 citations86
US4771178ASep 13, 1988
Goniometer stage
ZEISS STIFTUNG21 citations73
US4396861AAug 2, 1983
High voltage lead-through
ZEISS STIFTUNG7 citations70
US4194116AMar 18, 1980
Electron microscope or the like and method of use
ZEISS STIFTUNG5 citations62