Inventor

GELLRICH BERNHARD

DE55 patents

⚠️ This page may combine multiple inventors who share the name “GELLRICH BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GELLRICH BERNHARD

ZEISS CARL SMT AG

Collector with fastening devices for fastening mirror shells

Adjustment arrangement of an optical element

System for damping oscillations

Optical element deformation system

Mounting apparatus for an optical element

Oscillation damping system

Microlithographic projection exposure apparatus

Reflecting optical element with eccentric optical passageway

Focusing-device for the radiation from a light source

Collector with fastening devices for fastening mirror shells

Optical element with an optical axis

Adjustment arrangement of an optical element

Adjustment arrangement of an optical element

Catadioptric objective

Focusing-device for the radiation from a light source

Immersion lithography objective

Optical element module

Method for connection of an optical element to a mount structure

Optical element unit for exposure processes

ZEISS CARL SMT GMBH

Optical imaging device having at least one system diaphragm

Optical arrangement, in particular lithography system

Replacement device for an optical element

Optical projection system

Optical projection system

Optical imaging device and method for reducing dynamic fluctuations in pressure difference

Optical imaging device with thermal attenuation

Optical imaging device with thermal attenuation

Projection exposure apparatus for semiconductor lithography

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

Optical projection system

Optical element unit for exposure processes

Optical imaging device with thermal attenuation

Connection arrangement for a force-fit connection between ceramic components

ZEISS STIFTUNG

Assembly comprising an optical element and a mount

Mounting apparatus for an optical element

Optical imaging device, in particular lens system, with at least one system diaphragm

Method of straightening the supporting surfaces of supporting elements for optical elements

HOOGENDAM CHRISTIAAN ALEXANDER

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

ZEISS CARL SEMICONDUCTOR MFG

Adjusting apparatus for an optical element in a lens system

Mount for an optical element in an optical imaging device

ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

SIX STEPHAN

Optical arrangement for immersion lithography with a hydrophobic coating, as well as projection exposure apparatus comprising the same

RAU JOHANNES

Optical projection system

HEMBACHER STEFAN

Optical imaging device and method for reducing dynamic fluctuations in pressure difference

VAN EMPEL TJARKO ADRIAAN RUDOLF

Lithographic appararus and method

LIMBACH GUIDO

Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations

SCHWERTNER TILMAN

Optical element unit for exposure processes having sealing element