Inventor
GEUPPERT BERNHARD
DE37 patents
⚠️ This page may combine multiple inventors who share the name “GEUPPERT BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
16 patentsUS10635003B2Apr 28, 2020
Lithography system and method
ZEISS CARL SMT GMBH2 citations73
US9304404B2Apr 5, 2016
Arrangement for actuating an element in a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH5 citations72
US9410662B2Aug 9, 2016
Arrangement for mounting an optical element, in particular in an EUV projection exposure apparatus
ZEISS CARL SMT GMBH3 citations69
US10416570B2Sep 17, 2019
Optical imaging arrangement with a piezoelectric device
ZEISS CARL SMT GMBH3 citations67
US9557653B2Jan 31, 2017
Optical projection system
ZEISS CARL SMT GMBH1 citations62
US9436095B2Sep 6, 2016
Exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH1 citations62
US9104016B2Aug 11, 2015
Optical projection system
ZEISS CARL SMT GMBH2 citations62
US10890850B2Jan 12, 2021
Optical imaging arrangement with actively adjustable metrology support units
ZEISS CARL SMT GMBH0 citations52
US8659745B2Feb 25, 2014
Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrations
ZEISS CARL SMT GMBH1 citations52
US10599051B2Mar 24, 2020
Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus
ZEISS CARL SMT GMBH0 citations51
US10345710B2Jul 9, 2019
Microlithographic projection exposure apparatus and measuring device for a projection lens
ZEISS CARL SMT GMBH0 citations51
US9891535B2Feb 13, 2018
Optical projection system
ZEISS CARL SMT GMBH0 citations51
US10042271B2Aug 7, 2018
Projection exposure system for microlithography with a measurement device
ZEISS CARL SMT GMBH0 citations50
US9696639B2Jul 4, 2017
Projection exposure system for microlithography with a measurement device
ZEISS CARL SMT GMBH0 citations50
US11314177B2Apr 26, 2022
Supporting an optical element
ZEISS CARL SMT GMBH0 citations46
US9551944B2Jan 24, 2017
Method for replacing objective parts
ZEISS CARL SMT GMBH0 citations39
ZEISS CARL SMT AG
8 patentsUS7321126B2Jan 22, 2008
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG26 citations92
US7760327B2Jul 20, 2010
Reflecting optical element with eccentric optical passageway
ZEISS CARL SMT AG8 citations82
US7410265B2Aug 12, 2008
Focusing-device for the radiation from a light source
ZEISS CARL SMT AG7 citations73
US7091505B2Aug 15, 2006
Collector with fastening devices for fastening mirror shells
ZEISS CARL SMT AG8 citations73
US7581305B2Sep 1, 2009
Method of manufacturing an optical component
ZEISS CARL SMT AG2 citations61
US7692881B2Apr 6, 2010
Structure for use in a projection exposure system for manufacturing semiconductors
ZEISS CARL SMT AG2 citations57
US7826155B2Nov 2, 2010
Vibration damping for photolithographic lens mount
ZEISS CARL SMT AG4 citations54
US7871171B2Jan 18, 2011
Focusing-device for the radiation from a light source
ZEISS CARL SMT AG0 citations52