Inventor
HASHIMOTO YUSAKU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “HASHIMOTO YUSAKU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS11774854B2Oct 3, 2023
Substrate processing method, storage medium, and substrate processing apparatus
TOKYO ELECTRON LTD2 citations72
US11407005B2Aug 9, 2022
Coating method, coating apparatus and recording medium
TOKYO ELECTRON LTD2 citations70
US11480881B2Oct 25, 2022
Substrate processing method, storage medium, and substrate processing apparatus
TOKYO ELECTRON LTD0 citations62
US11079679B2Aug 3, 2021
Substrate processing method and recording medium capable of suppressing non-uniformity in degree of progression of processing depending on position on substrate
TOKYO ELECTRON LTD1 citations61
US12404587B2Sep 2, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations60
US10359702B2Jul 23, 2019
Development processing apparatus, development processing method, and storage medium
TOKYO ELECTRON LTD1 citations60
US11938511B2Mar 26, 2024
Coating method, coating apparatus and recording medium
TOKYO ELECTRON LTD0 citations59
US10203605B2Feb 12, 2019
Development method, development device, and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations50
US12216406B2Feb 4, 2025
Coating method and coating apparatus
TOKYO ELECTRON LTD0 citations49
US10185220B2Jan 22, 2019
Substrate processing method, substrate processing apparatus, and non-transitory computer-readable medium
TOKYO ELECTRON LTD0 citations40
US10108111B1Oct 23, 2018
Developing method, developing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39
US12240012B2Mar 4, 2025
Coating film forming method, coating film forming apparatus, and storage medium
TOKYO ELECTRON LTD0 citations37