Inventor
AVISHAI AMIR
US6 patents
Patents
6 patentsUS12293895B2May 6, 2025
Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
ZEISS CARL SMT GMBH0 citations60
US11810749B2Nov 7, 2023
Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
ZEISS CARL SMT GMBH0 citations60
US11848172B2Dec 19, 2023
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations59
US12283504B2Apr 22, 2025
Contact area size determination between 3D structures in an integrated semiconductor sample
ZEISS CARL SMT GMBH0 citations58
US11915908B2Feb 27, 2024
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations58
US12288705B2Apr 29, 2025
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
ZEISS CARL SMT GMBH0 citations47