Inventor
ST AMOUR ANTHONY
US5 patents
Patents
5 patentsUS10707133B2Jul 7, 2020
Trench plug hardmask for advanced integrated circuit structure fabrication
INTEL CORP5 citations83
US7314836B2Jan 1, 2008
Enhanced nitride layers for metal oxide semiconductors
INTEL CORP12 citations79
US11887838B2Jan 30, 2024
Trench plug hardmask for advanced integrated circuit structure fabrication
INTEL CORP2 citations72
US12349450B2Jul 1, 2025
Trench plug hardmask for advanced integrated circuit structure fabrication
INTEL CORP0 citations61
US11437285B2Sep 6, 2022
Trench plug hardmask for advanced integrated circuit structure fabrication
INTEL CORP0 citations61