Inventor
NAKAMURA KAZUMITSU
JP9 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA KAZUMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
8 patentsUS5168166ADec 1, 1992
Charged particle beam projection aligner having position detector using light beam
HITACHI LTD47 citations90
US4433243AFeb 21, 1984
Electron beam exposure apparatus
HITACHI LTD16 citations73
US5384466AJan 24, 1995
Electron beam lithography apparatus and a method thereof
HITACHI LTD7 citations72
US5117111AMay 26, 1992
Electron beam measuring apparatus
HITACHI LTD15 citations72
US5130550AJul 14, 1992
Electron beam lithography apparatus having device for correcting beam shape
HITACHI LTD7 citations69
US4973849ANov 27, 1990
Electron beam lithography apparatus having external magnetic field correcting device
HITACHI LTD13 citations65
US4777369AOct 11, 1988
Electron beam lithographic method
HITACHI LTD3 citations62
US4853549AAug 1, 1989
Electron beam drawing method
HITACHI LTD5 citations61