Inventor
PONTEFRACT JOHN
GB5 patents
Patents
5 patentsUS5886355AMar 23, 1999
Ion implantation apparatus having increased source lifetime
APPLIED MATERIALS INC101 citations95
US5554852ASep 10, 1996
Ion implantation having increased source lifetime
APPLIED MATERIALS INC45 citations93
US5517077AMay 14, 1996
Ion implantation having increased source lifetime
APPLIED MATERIALS INC38 citations93
US5262652ANov 16, 1993
Ion implantation apparatus having increased source lifetime
APPLIED MATERIALS INC71 citations93
US7004234B2Feb 28, 2006
Vaporizer for generating feed gas for an arc chamber
APPLIED MATERIALS INC4 citations60