Inventor
BURGIN DAVID R
FR6 patents
Patents
6 patentsUS5886355AMar 23, 1999
Ion implantation apparatus having increased source lifetime
APPLIED MATERIALS INC101 citations95
US5554852ASep 10, 1996
Ion implantation having increased source lifetime
APPLIED MATERIALS INC45 citations93
US5517077AMay 14, 1996
Ion implantation having increased source lifetime
APPLIED MATERIALS INC38 citations93
US5262652ANov 16, 1993
Ion implantation apparatus having increased source lifetime
APPLIED MATERIALS INC71 citations93
US5130552AJul 14, 1992
Improved ion implantation using a variable mass resolving system
APPLIED MATERIALS INC33 citations87
US6093456AJul 25, 2000
Beam stop apparatus for an ion implanter
APPLIED MATERIALS INC12 citations68