Inventor
WANG YEN-KUN
US12 patents
⚠️ This page may combine multiple inventors who share the name “WANG YEN-KUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS5866795AFeb 2, 1999
Liquid flow rate estimation and verification by direct liquid measurement
APPLIED MATERIALS INC564 citations97
US6176198B1Jan 23, 2001
Apparatus and method for depositing low K dielectric materials
APPLIED MATERIALS INC298 citations95
US6148761ANov 21, 2000
Dual channel gas distribution plate
APPLIED MATERIALS INC746 citations95
US7011710B2Mar 14, 2006
Concentration profile on demand gas delivery system (individual divert delivery system)
APPLIED MATERIALS INC29 citations91
US5968588AOct 19, 1999
In-situ liquid flow rate estimation and verification by sonic flow method
APPLIED MATERIALS INC50 citations91
US7192486B2Mar 20, 2007
Clog-resistant gas delivery system
APPLIED MATERIALS INC15 citations83
US12031885B2Jul 9, 2024
Leak detection for gas sticks
APPLIED MATERIALS INC1 citations58
US7205205B2Apr 17, 2007
Ramp temperature techniques for improved mean wafer before clean
APPLIED MATERIALS INC0 citations33