Inventor
CHANG FONG
US10 patents
⚠️ This page may combine multiple inventors who share the name “CHANG FONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5939831AAug 17, 1999
Methods and apparatus for pre-stabilized plasma generation for microwave clean applications
APPLIED MATERIALS INC348 citations99
US6709715B1Mar 23, 2004
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds
APPLIED MATERIALS INC109 citations97
US6086952AJul 11, 2000
Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer
APPLIED MATERIALS INC93 citations97
US5866795AFeb 2, 1999
Liquid flow rate estimation and verification by direct liquid measurement
APPLIED MATERIALS INC564 citations97
US5968588AOct 19, 1999
In-situ liquid flow rate estimation and verification by sonic flow method
APPLIED MATERIALS INC50 citations91