Inventor
CHISHOLM BRYNNE K
US3 patents
Patents
3 patentsUS6258205B1Jul 10, 2001
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
LSI LOGIC CORP17 citations91
US6080670AJun 27, 2000
Method of detecting a polishing endpoint layer of a semiconductor wafer which includes a non-reactive reporting specie
LSI LOGIC CORP31 citations91
US6071818AJun 6, 2000
Endpoint detection method and apparatus which utilize an endpoint polishing layer of catalyst material
LSI LOGIC CORP22 citations91