Inventor
HARVEY IAN ROBERT
US15 patents
⚠️ This page may combine multiple inventors who share the name “HARVEY IAN ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VLSI TECHNOLOGY INC
11 patentsUS6207543B1Mar 27, 2001
Metallization technique for gate electrodes and local interconnects
VLSI TECHNOLOGY INC58 citations96
US6241587B1Jun 5, 2001
System for dislodging by-product agglomerations from a polishing pad of a chemical mechanical polishing machine
VLSI TECHNOLOGY INC74 citations95
US5895245AApr 20, 1999
Plasma ash for silicon surface preparation
VLSI TECHNOLOGY INC20 citations92
US6060376AMay 9, 2000
Integrated etch process for polysilicon/metal gate
VLSI TECHNOLOGY INC16 citations82
US6084305AJul 4, 2000
Shaped etch-front for self-aligned contact
VLSI TECHNOLOGY INC9 citations73
US6027950AFeb 22, 2000
Method for achieving accurate SOG etchback selectivity
VLSI TECHNOLOGY INC8 citations73
US6013558AJan 11, 2000
Silicon-enriched shallow trench oxide for reduced recess during LDD spacer etch
VLSI TECHNOLOGY INC15 citations73
US5821163AOct 13, 1998
Method for achieving accurate SOG etchback selectivity
VLSI TECHNOLOGY INC7 citations73
US5976987ANov 2, 1999
In-situ corner rounding during oxide etch for improved plug fill
VLSI TECHNOLOGY INC3 citations62
US6162650ADec 19, 2000
Via alignment, etch completion, and critical dimension measurement method and structure
VLSI TECHNOLOGY INC3 citations61
US6080677AJun 27, 2000
Method for preventing micromasking in shallow trench isolation process etching
VLSI TECHNOLOGY INC4 citations59